학술논문
'학술논문'
에서 검색결과 77건 | 목록
1~10
Academic Journal
Wei, C.-I.; Kang, S.; Oya, M.; Okamoto, Y.; Maruyama, K.; Yamazaki, Y.; Das, S.; Gillijns, W.; Halder, S.; Lorusso, G.; Fenger, G.; Khaira, G.; Latypov, A.; Kusnadi, I.
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2023, 22(4))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , DTCO and Computational Patterning III. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12954)
Conference
Alkoken, R.; Baram, M.; Oron, G.; Brand, O.; Geta, M.; Saha, K.; Miller, E.; Zavhon, T.; Tiwari, D.; Singh, D.; Schuch, N.; Robert, F.; Figueiro, T.; Sarkar, S.K.; Delgadillo, P.; Lorusso, G.; Beral, C.; Kim, Y.C.; Fenger, G.; Wei, C.-I.; Curvacho, G.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Conference
Xu, D.; Wu, S.; Gillijns, W.; Wiaux, V.; Philipsen, V.; Adams, A.; Zhang, X.; Tejnil, E.; Fenger, G.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 38th European Mask and Lithography Conference, EMLC 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12802)
Conference
Gillijns, W.; Lee, J.-U.; Kim, R.R.H.; Wei, C.-I.; Zhang, X.; Latypov, A.; Fenger, G.; Sturtevant, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Conference
Armeanu, A.-M.; Malankin, E.; Lafferty, N.; Fenger, G.; Wei, C.I.; Sears, M.K.; Zhang, X.; Gillijns, W.; Trivkovic, D.; Kim, R.-H.; Lee, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
Conference
Lee, J.; Halder, S.; Pham, V.T.; Fallica, R.; Heo, S.; Suh, H.S.; Blanco, V.; Gillijns, W.; Kim, R.H.; Sah, K.; Cross, A.; Maguire, E.; Armeanu, A.-M.; Liubich, V.; Malankin, E.; Zhang, X.; Sears, M.K.; Lafferty, N.; Fenger, G.; Wei, C.I.
In: Proceedings of SPIE - The International Society for Optical Engineering , DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
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[AR] Fenger, G.
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