학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 77건 | 목록 1~10
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2023, 22(4))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, DTCO and Computational Patterning III. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12954)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, 38th European Mask and Lithography Conference, EMLC 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12802)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, DTCO and Computational Patterning II. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12495)
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제한된 항목
[AR] Fenger, G.
발행연도 제한
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