학술논문
'학술논문'
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Academic Journal
Mallapragada, Dharik S.; Dvorkin, Yury; Modestino, Miguel A.; Esposito, Daniel V.; Smith, Wilson A.; Hodge, Bri-Mathias; Harold, Michael P.; Donnelly, Vincent M.; Nuz, Alice; Bloomquist, Casey; Baker, Kyri; Grabow, Lars C.; Yan, Yushan; Rajput, Nav Nidhi; Hartman, Ryan L.; Biddinger, Elizabeth J.; Aydil, Eray S.; Taylor, André D.
In Joule 18 January 2023 7(1):23-41
Academic Journal
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Dec2023, Vol. 41 Issue 6, p1-11, 11p
Academic Journal
Hao, Qinzhen; Elgarhy, Mahmoud A. I.; Kim, Pilbum; Nam, Sang Ki; Kang, Song-Yun; Donnelly, Vincent M.
Academic Journal
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2023, Vol. 41 Issue 3, p1-9, 9p
Academic Journal
Academic Journal
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2022, Vol. 40 Issue 5, p1-12, 12p
Conference
Qu, Chenhui; Tian, Peng; Lanham, Steven J.; Kushner, Mark J.; Ma, Tianyu; List, Tyler; Arora, Priyanka; Donnelly, Vincent M.
2018 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2018 IEEE International Conference on. :1-1 Jun, 2018
In-plasma photo-assisted etching of Si with chlorine aided by an external vacuum ultraviolet source.
Academic Journal
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2022, Vol. 40 Issue 2, p1-15, 15p
Academic Journal
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2022, Vol. 40 Issue 2, p1-8, 8p
Academic Journal
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[AR] Donnelly, Vincent M.
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