학술논문

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발행년	- (예 : 2010-2015)

Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction

Academic Journal

Matsushita, A.; Tsuchida, Y.; Ohtani, N.; Dojima, D.; Koide, K.; Kaneko, T.; Shikata, S.; Fujimori, N.

In: Diamond and Related Materials. (Diamond and Related Materials, January 2020, 101)

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

Suppression of In-Grown SF Formation and BPD Propagation in 4H-SiC Epitaxial Layer by Sublimating Sub-Surface Damage before the Growth

Book

Toda, K.; Dojima, D.; Mihara, H.; Mitani, S.-I.; Kaneko, T.; Kojima, K.

(Solid State Phenomena, 2023, 344:9-14)

Scopus Find it@PNU

Effect of Sub-Surface Damage Layer Removal by Sublimation Etching of 4H-SiC Bulk Wafers on PL Imaging of Crystal Defect Visibility

Book

Dojima, D.; Maki, M.; Dansako, D.; Toda, K.; Kaneko, T.

(Solid State Phenomena, 2023, 343:29-36)

Scopus Find it@PNU

4H-SiC Full Wafer Mapping Image of CMP-Finished Sub-Surface Damage by Laser Light Scattering

Book

Dojima, D.; Dansako, D.; Maki, M.; Toda, K.; Kaneko, T.

(Solid State Phenomena, 2023, 343:43-50)

Scopus Find it@PNU

Evaluation of growth sector orientation changes of high B doped high pressure and high temperature diamond by high resolution electron backscatter diffraction study

Academic Journal

Matsushita, A.; Tsuchida, Y.; Matsuoka, M.; Ohtani, N.; Ashida, K.; Dojima, D.; Koide, K.; Kaneko, T.; Shikata, S.

In: Japanese Journal of Applied Physics. (Japanese Journal of Applied Physics, 2019, 58(6))

Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

In-situ growth mode control of AlN on SiC substrate by sublimation closed space technique

Academic Journal

Dojima, D.; Ashida, K.; Kaneko, T.

In: Journal of Crystal Growth. (Journal of Crystal Growth, 1 February 2018, 483:206-210)

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

A Novel Approach of Utilizing Mechanically Flexible SiC Substrate to Grow Crack-Free AlN Bulk Crystal by Thermal Strain Relaxation Functionality

Book

Dojima, D.; Kaneko, T.; Matsubara, M.; Minamiyama, H.

In: Silicon Carbide and Related Materials 2021- Selected peer-reviewed extended papers abstracts of which were presented at the 13th European Conference on Silicon Carbide and Related Materials, ECSCRM 2021. (Materials Science Forum, 2022, 1062 MSF:28-32)

Scopus Find it@PNU

Rearrangement of surface structure of 4° off-axis 4H-SiC (0001) epitaxial wafer by high temperature annealing in Si/Ar ambient

Book

Ashida, K.; Dojima, D.; Kaneko, T.; Torimi, S.; Yabuki, N.; Sudo, Y.; Sakaguchi, T.; Nogami, S.; Kitabatake, M.

In: Silicon Carbide and Related Materials, 2017. (Materials Science Forum, 2018, 924 MSF:249-252)

Full Text (ProQuest Central) Scopus Find it@PNU

Evaluation of Polishing-Induced Subsurface Damage of 4H-SiC (0001) by Cross-Sectional Electron Backscattered Diffraction and Synchrotron X-Ray Micro-Diffraction

Conference

Ashida, K.; Dojima, D.; Kutsuma, Y.; Mizuki, J.-I.; Ohtani, N.; Kaneko, T.; Torimi, S.; Nogami, S.; Imai, Y.; Kimura, S.

In: MRS Advances. (MRS Advances, 2016, 1(55):3697-3702)

JCR 저널정보 Scopus Find it@PNU

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