학술논문
'학술논문'
에서 검색결과 14건 | 목록
1~10
Academic Journal
Kirchner, G.; Czanta, M.; Dellemann, G.; Jänsch, H.J.; Mannstadt, W.; Paggel, J.J.; Platzer, R.; Weindel, C.; Winnefeld, H.; Fick, D.
In Surface Science 2001 494(3):281-288
Academic Journal
In: Applied Physics Letters . (Applied Physics Letters, 9 May 2005, 86(19):1-3)
Conference
2006 5th IEEE Conference on Sensors; 2007, p331-333, 3p
Periodical
Kirchner, G.; Czanta, M.; Dellemann, G.; Jansch, H. J.; Mannstadt, W.; Paggel, J. J.; Platzer, R.; Weindel, C.; Winnefeld, H.; Fick, D.
Surface Science; 2001, Vol. 494 Issue: 3 p281-288, 8p
Conference
Garbowski, T.; Panteleit, F.; Dellemann, G.; Zeidler, D.; Gutsch, M.; Hohle, C.; Reich, E.; Rudolph, M.; Steidel, K.; Thrun, X.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Periodical
In: Photonics Spectra . (Photonics Spectra, March 2004, 38(3):108+110+112)
Conference
Malloy, M.; Bunday, B.; Wurm, S.; Thiel, B.; Kemen, T.; Zeidler, D.; Eberle, A.L.; Garbowski, T.; Dellemann, G.; Peters, J.H.
In: 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015 , 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. (2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015, 22 July 2015, :266-271)
Conference
Malloy, M.; Bunday, B.D.; Wurm, S.; Jindal, V.; Thiel, B.; Mukhtar, M.; Quoi, K.; Kemen, T.; Zeidler, D.; Eberle, A.L.; Garbowski, T.; Dellemann, G.; Peters, J.H.
In: Proceedings of SPIE - The International Society for Optical Engineering , 31st European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9661)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9424)
Conference
Malloy, M.; Bunday, B.D.; Wurm, S.; Thiel, B.; Mukhtar, M.; Quoi, K.; Kemen, T.; Zeidler, D.; Eberle, A.L.; Garbowski, T.; Dellemann, G.; Peters, J.H.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9423)
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제한된 항목
[AR] Dellemann, G.
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