학술논문
'학술논문'
에서 검색결과 6건 | 목록
1~10
Conference
Mehendale, M.; Antonelli, A.; Mair, R.; Mukundhan, P.; Bogdanowicz, J.; Charley, A.L.; Leray, P.; Yasin, F.; Crotti, D.
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2021 32nd Annual SEMI. :1-4 May, 2021
Conference
Mehendale, M.; Kotelyanskii, M.; Mair, R.; Mukundhan, P.; Bogdanowicz, J.; Teugels, L.; Charley, A.L.; Kuszewski, P.
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2020 31st Annual. :1-6 Aug, 2020
Academic Journal
In Microelectronic Engineering 2006 83(4):851-854
Printability and propagation of stochastic defects through a study of defects programmed on EUV mask
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11854)
Academic Journal
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, November 2005, 23(6):2668-2674)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6154 III)
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제한된 항목
[AR] Charley, A.L.
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