학술논문

발행년
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(예 : 2010-2015)
'학술논문' 에서 검색결과 40건 | 목록 1~10
Academic Journal
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(3):412-417 Aug, 2022
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 July 2023, 22(3))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology. (Journal of Micro/Nanopatterning, Materials and Metrology, 1 April 2022, 21(2))
Periodical
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120530S-120530S-9, 1084780p
Periodical
Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116111T-116111T-12, 11495002p
Academic Journal
Applied Physics A: Materials Science & Processing. Nov2008, Vol. 93 Issue 3, p593-598. 6p. 1 Black and White Photograph, 5 Graphs.
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering, Metrology, Inspection, and Process Control XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12053)
Conference
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2022. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 2022, 2022-May)
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제한된 항목
[AR] Cepler, A.
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