학술논문
'학술논문'
에서 검색결과 16건 | 목록
1~10
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8324)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2011. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8166)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7638)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Design for Manufacturability through Design-Process Integration. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6521)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Design and Process Integration for Microelectronic Manufacturing IV. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6156)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 25th Annual BACUS Symposium on Photomask Technology. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5992(2))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Design and Process Integration for Microelectronic Manufacturing III. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5756:141-149)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 25th Annual BACUS Symposium on Photomask Technology. (Proceedings of SPIE - The International Society for Optical Engineering, 2005, 5992(2))
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[AR] Brist, T.
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