학술논문
'학술논문'
에서 검색결과 4건 | 목록
1~10
Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Sweat, Daniel; Lu, Xinlin; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Van Driessche, Veerle; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571T-129571T-8, 1166148p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Lowes, Joyce; Zhang, Ruimeng; Luo, Ming; Brakensiek, Kelsey; Driessche, Veerle Van; Guerrero, Douglas J.
Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124980N-124980N-11, 12373032p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Lu, Xinlin; Grannemann, Stephen; Sweat, Daniel; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Krishnamurthy, Vandana; Van Driessche, Veerle; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295715-1295715-13
Conference
Li, Si; Lowes, Joyce; Zhang, Ruimeng; Luo, Ming; Brakensiek, Kelsey; Driessche, Veerle Van; Guerrero, Douglas J.
Proceedings of SPIE; 4/11/2023, Vol. 12498, p124980N-124980N-11, 1p
검색 결과 제한하기
제한된 항목
[AR] Brakensiek, Kelsey
발행연도 제한
-
학술DB(Database Provider)
자료유형(Source Type)
언어