학술논문
'학술논문'
에서 검색결과 36건 | 목록
1~10
Periodical
Naulleau, Patrick P.; Gargini, Paolo A.; Itani, Toshiro; Ronse, Kurt G.; Kim, Eunju; Kim, Wooseok; Lee, Jonggwan; Kim, Seongjong; Lee, Sukyong; Kwak, Nohong; Kang, Mincheol; Jeong, Yongchul; Hwang, Myungsoo; Park, Chang-Min; Koo, Kyoil; Jeong, Seongtae; Biafore, John; Smith, Mark; Graves, Trey; Burov, Anatoly; Vukkadala, Pradeep; Parsey, Guy; Zhang, Cao; Bai, Kunlun; Krek, Janez; Higgins, Craig; Bakarian, Sergei; Ko, Kyeongeun; Gronheid, Roel; Sah, Kaushik; Cross, Andrew; Liu, Yi; Vaglio Pret, Alessandro; Walker, Chris; Tolani, Vikram; Hwa, George; Hu, Peter; Song, Chang; Arkhipov, Alex; Bouckou, Loemba; Liu, Chi-Ping; Yang, Xiaochun; O'Hara, Kana; Son, Donghwan
Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p127500C-127500C-13, 12622514p
Conference
Kim, Eunju; Kim, Wooseok; Lee, Jonggwan; Kim, Seongjong; Lee, Sukyong; Kwak, Nohong; Kang, Mincheol; Jeong, Yongchul; Hwang, Myungsoo; Park, Chang-Min; Koo, Kyoil; Jeong, Seongtae; Biafore, John; Smith, Mark; Graves, Trey; Burov, Anatoly; Vukkadala, Pradeep; Parsey, Guy; Zhang, Cao; Bai, Kunlun
Proceedings of SPIE; 12/19/2023, Vol. 12750, p127500C-127500C-13, 1p
Academic Journal
Quantifying imaging performance bounds of extreme dipole illumination in high NA optical lithography
Periodical
Kasprowicz, Bryan S.; Buck, Peter D.; Lee, Myungjun; Smith, Mark D.; Biafore, John; Graves, Trey; Levy, Ady
Proceedings of SPIE; October 2016, Vol. 9985 Issue: 1 p99850X-99850X-16, 9885167p
Conference
Proceedings of SPIE; Nov2009 Part 3, Issue 1, p75200B-75200B-10, 10p
Conference
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72750W-72750W-10, 10p
Conference
Kudo, Takanori; Lin, Guanyang; Lee, Dongkwan; Rahman, Dalil; Timko, Allen; Mckenzie, Douglas; Anyadiegwu, Clement; Chiu, Simon; Houlihan, Frank; Rentkiewicz, David; Dammel, Ralph R.; Padmanaban, Munirathna; Biafore, John
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61532C-61532C-9, 9p
Academic Journal
Smith, Mark D.; Graves, Trey; Biafore, John; Robertson, Stewart; Cheolkyun Kim; James Moon; Jaeheon Kim; Cheolkyu Bok; Donggyu Yim
Periodical
Pret, Alessandro Vaglio; Gronheid, Roel; Engelen, Jan; Yan, Pei-Yang; Leeson, Michael J.; Younkin, Todd R.; Garidis, Konstantinos; Biafore, John
Japanese Journal of Applied Physics; June 2013, Vol. 52 Issue: 6 p06GC02-06GC05, 4p
Periodical
Naulleau, Patrick P.; Sarma, Chandra; Biafore, John; Cho, Kyoungyong; Petrillo, Karen; Neisser, Mark
Proceedings of SPIE; April 2013, Vol. 8679 Issue: 1 p86792U-86792U-7, 781136p
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[AR] Biafore, John
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