학술논문
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Conference
Kim, E.; Kim, W.; Lee, J.; Kim, S.; Lee, S.; Kwak, N.; Kang, M.; Jeong, Y.; Hwang, M.; Park, C.; Koo, K.; Jeong, S.; Biafore, J.; Smith, M.; Graves, T.; Burov, A.; Vukkadala, P.; Parsey, G.; Zhang, C.; Bai, K.; Krek, J.; Higgins, C.; Bakarian, S.; Ko, K.; Gronheid, R.; Sah, K.; Cross, A.; Liu, Y.; Pret, A.V.; Walker, C.; Tolani, V.; Hwa, G.; Hu, P.; Chang Song; Arkhipov, A.; Bouckou, L.; Liu, C.-P.; Yang, X.; O Hara, K.; Son, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Progress towards production worthy EUV photoresists: Balancing litho, Outgassing and OOB performance
Academic Journal
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 25 September 2014, 27(5):667-675)
Academic Journal
Thackeray, J.; Cameron, J.; Jain, V.; LaBeaume, P.; Coley, S.; Ongayi, O.; Wagner, M.; Rachford, A.; Biafore, J.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2013, 26(5):605-610)
Academic Journal
Thackeray, J.W.; Cameron, J.F.; Wagner, M.; Coley, S.; Labeaume, V.P.; Ongayi, O.; Montgomery, W.; Lovell, D.; Biafore, J.; Chakrapani, V.; Ko, A.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2012, 25(5):641-646)
Academic Journal
In: Journal of Micro/Nanolithography, MEMS, and MOEMS . (Journal of Micro/Nanolithography, MEMS, and MOEMS, April-June 2011, 10(2))
Academic Journal
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2010, 23(5):631-637)
Academic Journal
In: Journal of Macromolecular Science - Pure and Applied Chemistry . (Journal of Macromolecular Science - Pure and Applied Chemistry, 2002, 39 A(1-2):1-16)
Academic Journal
Malik, S.; De, B.; Biafore, J.; Spaziano, G.; Sarubbi, T.; Dilocker, S.; Bowden, M.; Reybrouc, M.; Grozev, G.; Van Driessche, V.; Tzviatkov, P.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 2001, 14(3):489-494)
Academic Journal
Goethals, A.M.; Sugihara, T.; Ronsc, K.; Steinhausler, T.; Nalamasu, O.; Houlihan, F.; Komctani, J.; Timko, A.; Cirelli, R.; Poliers, I.; Van Driessche, V.; Gabor, A.; Biafore, J.; Van Roey, F.; Tzviatkov, P.; Biakeney, A.; Medina, A.; Slater, S.
In: Journal of Photopolymer Science and Technology . (Journal of Photopolymer Science and Technology, 1998, 11(3):513-524)
Periodical
In: Solid State Technology . (Solid State Technology, January 2012, 55(1):14-18)
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제한된 항목
[AR] Biafore, J.
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