학술논문
'학술논문'
에서 검색결과 188건 | 목록
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Academic Journal
In Optics and Lasers in Engineering October 2020 133
Academic Journal
In Microelectronic Engineering 16 August 2015 144:12-18
Academic Journal
In Microelectronic Engineering 1 June 2015 140:60-66
Academic Journal
In: Fractal and Fractional . (Fractal and Fractional, February 2023, 7(2))
Conference
Berenschot, J.W.; Sun, X.; Le The, H.; Tiggelaar, R.M.; de Boer, M.J.; Eijkel, J.C.T.; Gardeniers, J.G.E; Tas, N.R.; Sarajlic, E.
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Nano/Micro Engineered and Molecular Systems (NEMS), 2017 IEEE 12th International Conference on. :57-60 Apr, 2017
Academic Journal
Capuano, L.; Feinaeugle, M.; Römer, G.R.B.E.; Berenschot, J.W.; Tas, N.R.; Gardeniers, J.G.E.; Tiggelaar, R.M.
In: Journal of Micromechanics and Microengineering . (Journal of Micromechanics and Microengineering, October 2022, 32(12))
Conference
Berenschot, J.W.; Tiggelaar, R.M.; Geerlings, J.; Gardeniers, J.G.E.; Tas, N.R.; Malankowska, M.; Pina, M.P.; Mallada, R.
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2016 Symposium on. :1-4 May, 2016
Academic Journal
Tiggelaar, R.M. ; Male, P. van; Berenschot, J.W.; Gardeniers, J.G.E.; Oosterbroek, R.E.; Croon, M.H.J.M. de; Schouten, J.C.; Berg, A. van den; Elwenspoek, M.C.
In Sensors & Actuators: A. Physical 2005 119(1):196-205
Conference
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :100-103 Jan, 2014
Academic Journal
In Microelectronic Engineering 2003 67:422-429
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[AR] Berenschot, J.W.
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