학술논문
'학술논문'
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Thareja, G.; Pal, A.; Ma, Q.; Ching, C.; Patel, S.; Gao, X.; Dag, S.; Qi, Z.; Zhang, A.; Yue, S.; Lei, W.; Xu, Y.; Lei, Y.; Jiang, H.; You, S.; Zheng, W.; Hung, R.; Costrini, G.; Zhu, Q.; Tran, R.; Gupta, R.; Reddy, V.; Vyas, P.B.; Hassan, S.; Cai, M.P.; Shen, G.; Chen, Z.; Hou, W.; Lei, J.; Wang, R.; Shen, W.; Deshpande, S.; Huey, S.; Tang, J.; Naik, M.; Kesapragada, S.; Ayyagari-Sangamali, B.; Bazizi, E.M.; Tang, X.
In: Technical Digest - International Electron Devices Meeting, IEDM , 2023 International Electron Devices Meeting, IEDM 2023. (Technical Digest - International Electron Devices Meeting, IEDM, 2023)
BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond
Conference
Thareja, G.; Pal, A.; Wang, X.; Dag, S.; You, S.; Sharma, S.; Zhu, Q.; Cervantes, C.L.; Hwang, S.; Spuller, M.; Ng, B.; Kumar, P.S.; Tam, N.; Gage, M.; Deshpande, S.; Wu, Z.; Jansen, A.; Dey, L.; Chen, F.; Xie, X.; Kashefizadeh, K.; Reddy, V.; Lo, A.; Chen, Z.; Huey, S.; Tang, J.; Ren, H.; Naik, M.; Brown, B.; Kesapragada, S.; Ayyagari-Sangamali, B.; Bazizi, E.M.; Tang, X.
In: Digest of Technical Papers - Symposium on VLSI Technology , 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023. (Digest of Technical Papers - Symposium on VLSI Technology, 2023, 2023-June)
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[AR] Ayyagari-Sangamali, B.
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