학술논문
'학술논문'
에서 검색결과 16건 | 목록
1~10
Conference
McIntyre, G.; Gallagher, E.; Smith, A.C.; Lawliss, M.; Robinson, T.; LeClaire, J.; Bozak, R.; White, R.; Archuletta, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IV. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8679)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8441)
Conference
Figliolini, A.; Archuletta, M.; LeClaire, J.; Brinkley, D.; Doerr, D.; White, R.; Bozak, R.; Lee, D.A.
In: Proceedings of SPIE - The International Society for Optical Engineering , 28th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8352)
Conference
Lin, J.-H.; Chen, C.Y.; Tsai, F.G.; Robinson, T.; Yi, D.; LeClaire, J.; White, R.; Bozak, R.; Archuletta, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2011. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8166)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2011. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8166)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2011. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8166)
Conference
Ku, T.; Tan, S.K.; Chua, G.S.; LeClaire, J.; Bozak, R.; White, R.; Robinson, T.; Archuletta, M.; Lee, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7638)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7748)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2010. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7823(PART 1))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7748)
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제한된 항목
[AR] Archuletta, M.
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