학술논문

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발행년	- (예 : 2010-2015)

전체선택

First demonstration of a CMOS over CMOS 3D VLSI CoolCube™ integration on 300mm wafers

Conference

Brunet, L.; Batude, P.; Fenouillet-Beranger, C.; Besombes, P.; Hortemel, L.; Ponthenier, F.; Previtali, B.; Tabone, C.; Royer, A.; Agraffeil, C.; Euvrard-Colnat, C.; Seignard, A.; Morales, C.; Fournel, F.; Benaissa, L.; Signamarcheix, T.; Besson, P.; Jourdan, M.; Kachtouli, R.; Benevent, V.; Hartmann, J.-M.; Comboroure, C.; Allouti, N.; Posseme, N.; Vizioz, C.; Arvet, C.; Barnola, S.; Kerdiles, S.; Baud, L.; Pasini, L.; Lu, C.-M. V.; Deprat, F.; Toffoli, A.; Romano, G.; Guedj, C.; Delaye, V.; Boeuf, F.; Faynot, O.; Vinet, M.

2016 IEEE Symposium on VLSI Technology VLSI Technology, 2016 IEEE Symposium on. :1-2 Jun, 2016

Full Text (IEEE) Find it@PNU

3DVLSI with CoolCube process: An alternative path to scaling

Conference

Batude, P.; Fenouillet-Beranger, C.; Pasini, L.; Lu, V.; Deprat, F.; Brunet, L.; Sklenard, B.; Piegas-Luce, F.; Casse, M.; Mathieu, B.; Billoint, O.; Cibrario, G.; Turkyilmaz, O.; Sarhan, H.; Thuries, S.; Hutin, L.; Sollier, S.; Widiez, J.; Hortemel, L.; Tabone, C.; Samson, M-P; Previtali, B.; Rambal, N.; Ponthenier, F.; Mazurier, J.; Beneyton, R.; Bidaud, M.; Josse, E.; Petitprez, E.; Rozeau, O.; Rivoire, M.; Euvard-Colnat, C.; Seignard, A.; Fournel, F.; Benaissa, L.; Coudrain, P.; Leduc, P.; Hartmann, J-M.; Besson, P.; Kerdiles, S.; Bout, C.; Nemouchi, F.; Royer, A.; Agraffeil, C.; Ghibaudo, G.; Signamarcheix, T.; Haond, M.; Clermidy, F.; Faynot, O.; Vinet, M.

2015 Symposium on VLSI Technology (VLSI Technology) VLSI Technology (VLSI Technology), 2015 Symposium on. :T48-T49 Jun, 2015

Full Text (IEEE) Find it@PNU

Numerical study of bimetallic actuated micro-membrane with large deformations

Academic Journal

Lefevre, R.; Salette, A.; Agraffeil, C.; Guillen, J.; Morfouli, P.; Montès, L.; Déhan, C.

In: Journal of Micromechanics and Microengineering. (Journal of Micromechanics and Microengineering, January 2013, 23(1))

Web of Science JCR 저널정보 Scopus Find it@PNU

Strategies for patterning silicon nanostructures with diblock copolymers, in view of application to microelectronics and optoelectronics

Academic Journal

Gay, G.; Jalaguier, E.; De Salvo, B.; Baron, T.; Agraffeil, C.; Salhi, B.; Chevolleau, T.; Cunge, G.; Aissou, K.

In: Science of Advanced Materials. (Science of Advanced Materials, June 2011, 3(3):490-495)

Web of Science JCR 저널정보 Scopus Find it@PNU

CMOS compatible strategy based on selective atomic layer deposition of a hard mask for transferring block copolymer lithography patterns

Academic Journal

Gay, G.; Grampeix, H.; Martin, F.; Jalaguier, E.; De Salvo, B.; Baron, T.; Agraffeil, C.; Salhi, B.; Chevolleau, T.; Cunge, G.; Tortai, J.-H.

In: Nanotechnology. (Nanotechnology, 29 October 2010, 21(43))

Web of Science JCR 저널정보 Scopus Find it@PNU

Thermal sensors cointegrated within a MEMS thermally actuated ultrathin membrane

Academic Journal

Salette, A.; Lefevre, R.; Agraffeil, C.; Guillen, J.; Dehan, C.; Morfouli, P.; Montes, L.

JOURNAL OF MICROMECHANICS AND MICROENGINEERING; JUN 2012, 22 6, p065029 9p.

Web of Science JCR 저널정보 Scopus Find it@PNU

Patterning with Self-Assembling Block Copolymers

Book

Aissou, K.; Kogelschatz, M.; Agraffeil, C.; Pascale, A.; Baron, T.

In: Nano-Lithography. (Nano-Lithography, 7 March 2013, :231-248)

Scopus Find it@PNU

Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

Book

Baron, T.; Agraffeil, C.; Dhalluin, F.; Kogelschtaz, M.; Cunge, G.; Chevolleau, T.; Salem, B.; Salhi, B.; Abed, H.; Potié, A.; Latu-Romain, L.; Ternon, C.; Aissou, K.; Montés, L.; Mur, P.; Molas, G.; De Salvo, B.; Jalaguier, E.; Ernst, T.; Ferret, P.; Gentile, P.; Pauc, N.

In: Future Trends in Microelectronics: From Nanophotonics to Sensors and Energy. (Future Trends in Microelectronics: From Nanophotonics to Sensors and Energy, 18 August 2010, :183-190)

Scopus Find it@PNU

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