학술논문
'학술논문'
에서 검색결과 17건 | 목록
1~10
Academic Journal
In Microelectronic Engineering 2004 73:161-166
Academic Journal
Baek, S.-Y.; Cole, D.C.; Yeung, M.S.; Wei, A.; Nellis, G.; Abdo, A.Y.; Engelstad, R.L.; Rothschild, M.; Switkes, M.
In: Journal of Microlithography, Microfabrication and Microsystems . (Journal of Microlithography, Microfabrication and Microsystems, January 2005, 4(1):1-10)
Academic Journal
In: Journal of Microlithography, Microfabrication and Microsystems . (Journal of Microlithography, Microfabrication and Microsystems, April 2004, 3(2):232-238)
Academic Journal
In: Journal of Microlithography, Microfabrication and Microsystems . (Journal of Microlithography, Microfabrication and Microsystems, January 2004, 3(1):28-34)
Academic Journal
In: Journal of Microlithography, Microfabrication and Microsystems . (Journal of Microlithography, Microfabrication and Microsystems, January 2004, 3(1):122-129)
Academic Journal
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures . (Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, November 2002, 20(6):2995-2999)
Academic Journal
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2002, 4688(2):725-732)
Conference
Casati, N.; Gabrani, M.; Viswanathan, R.; Jaiswal, O.; Bayraktar, Z.; Abdo, A.Y.; Oberschmidt, J.; Demaris, D.; Krause, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2014, 9052)
Conference
Talbi, M.; Abdo, A.Y.; Bailey, T.C.; Dunn, D.N.; Nickel, J.; Shao, D.; Viswanathan, R.; Conley, W.; Marokkey, S.; Sarma, C.; Fujimoto, M.; Chung, N.Y.; Lee, S.H.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7640)
Conference
Engelstad, R.L.; Lovell, E.G.; Mikkelson, A.R.; Nataraju, M.; Ramaswamy, V.; Sohn, J.; Dicks, G.A.; Abdo, A.Y.; Tejeda, R.O.
In: Proceedings of SPIE - The International Society for Optical Engineering , EMLC 2006: 22nd European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6281)
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제한된 항목
[AR] Abdo, A.Y.
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