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A new highly automated sputter equipment for in situ investigation of deposition processes with synchrotron radiation

Document Type

Journal

Author

Doehrmann, Ralph; Botta, Stephan; Buffet, Adeline; Santoro, Gonzalo; Schlage, Kai; Schwartzkopf, Matthias; Bommel, Sebastian; Risch, Johannes F. H.; Mannweiler, Roman; Brunner, Simon; Metwalli, Ezzeldin; Mueller-Buschbaum, Peter; Roth, Stephan V.

Source

REVIEW OF SCIENTIFIC INSTRUMENTS; APR 2013, 84 4, p043901 8p.

Subject

Language

English

ISSN

00346748

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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