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Highly Scaled BEOL-Compatible Thin Film Transistors With Ultrathin Atomic Layer Deposited Indium-Tin-Zinc-Oxide Channel

Document Type

Journal

Author

Liang, Yan-Kui; Zheng, Jun-Yang; Lin, Yu-Lon; Lu, Yu-Cheng; Hsieh, Dong-Ru; Chou, Tsung-Te; Kei, Chi-Chung; Huang, Huai-Ying; Lin, Yu-Ming; Tseng, Yuan-Chieh; Chao, Tien-Sheng; Chang, Edward Yi; Toprasertpong, Kasidit; Takagi, Shinichi; Lin, Chun-Hsiung

Source

IEEE TRANSACTIONS ON ELECTRON DEVICES; APR 10 2024, 7p.

Subject

Language

English

ISSN

15579646

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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