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Composition control and ferroelectric properties of sidewalls in integrated three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Document Type

Journal

Author

Goux, L; Lisoni, JG; Schwitters, M; Paraschiv, V; Maes, D; Haspeslagh, L; Wouters, DJ; Menou, N; Turquat, C; Madigou, V; Muller, C; Zambrano, R

Source

JOURNAL OF APPLIED PHYSICS; SEP 1 2005, 98 5, p054507 7p.

Subject

Language

English

ISSN

00218979

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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