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Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors

Document Type

Journal

Author

Yoo, K. P.; Hong, H. P.; Lee, M. J.; Min, S. J.; Park, C. W.; Choi, W. S.; Min, N. K.

Source

MEASUREMENT SCIENCE AND TECHNOLOGY; NOV 2011, 22 11, p115206 10p.

Subject

Language

English

ISSN

13616501

Online Access

Web of Science JCR 저널정보 Scopus Find it@PNU

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