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Numerical study on variable aperture extraction grids of a titanium hydride cathodic vacuum arc ion source

Document Type

Journal

Author

Wu, W. B.; Zhou, H. J.; Zhou, Q. H.; Yang, W.; Dong, Y.; Yang, W. Y.

Source

JOURNAL OF INSTRUMENTATION; JUN 2022, 17 6, pP06005 17p.

Subject

Language

English

ISSN

17480221

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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