학술논문

EFFECTS OF OXYGEN ADDITION ON DIAMOND FILM GROWTH BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA CVD APPARATUS
Document Type
Journal
Source
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS; JUL 1 1991, 30 7A, pL1199-pL1202, 4p.
Subject
Language
English
ISSN
00214922