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Development of high-vacuum planar magnetron sputtering using an advanced magnetic field geometry

Document Type

Journal

Author

Ohno, Takahiro; Yagyu, Daisuke; Saito, Shigeru; Ohno, Yasunori; Nakano, Hirofumi; Itoh, Masatoshi; Uhara, Yoshio; Miura, Tsutomu

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A; NOV 2015, 33 6, p063001 4p.

Subject

Language

English

ISSN

15208559

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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