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Piezoelectric unimorph microactuator arrays for single-crystal silicon continuous-membrane deformable mirror

Document Type

Journal

Author

Hishinuma, Y; Yang, EH

Source

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS; APR 2006, 15 2, p370-p379, 10p.

Subject

Language

English

ISSN

10577157

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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