학술논문

ETCHING OF INP(100) 4X2 AND MOLECULAR-BEAM EPITAXIALLY GROWN GAAS(100)-C(4X4) WITH ATOMIC-HYDROGEN
Document Type
Journal
Source
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B; JUL-AUG 1993, 11 4, p1497-p1501, 5p.
Subject
Language
English
ISSN
10711023