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Effects of post metallization annealing on Al2O3 atomic layer deposition on n-GaN

Document Type

Journal

Author

Tadmor, Liad; Brusaterra, Enrico; Treidel, Eldad Bahat; Brunner, Frank; Bickel, Nicole; Vandenbroucke, Sofie S. T.; Detavernier, Christophe; Wuerfl, Joachim; Hilt, Oliver

Source

SEMICONDUCTOR SCIENCE AND TECHNOLOGY; JAN 1 2023, 38 1, p015006 9p.

Subject

Language

English

ISSN

13616641

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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