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Effect of photo-assisted RIE damage on GaN

Document Type

Journal

Author

Mouffak, Z; Medelci-Djezzar, N; Boney, C; Bensaoula, A; Trombetta, L

Source

MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH; 2003, 8 7, p7 4p.

Subject

Language

English

ISSN

10925783

Online Access

Web of Science Scopus Find it@PNU

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