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Creating room temperature Ohmic contacts to 4H-SiC: studied by specific contact resistance measurements and X-ray photoelectron spectroscopy

Document Type

Journal

Author

Guy, OJ; Pope, G; Blackwood, I; Teng, KS; Chen, L; Lee, WY; Wilks, SP; Mawby, PA

Source

SURFACE SCIENCE; DEC 10 2004, 573 2, p253-p263, 11p.

Subject

Language

English

ISSN

00396028

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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