학술논문

Impact of in situ NH3 preannealing on sub-100 nm tungsten polymetal gate electrode during the sealing nitride formation

Document Type

Journal

Author

Source

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS; APR 2004, 43 4B, p1829-p1832, 4p.

Subject

Language

English

ISSN

00214922

이메일

부산대학교 도서관