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High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

Document Type

Journal

Author

Belmonte, JC; Puigcorbe, J; Arbiol, J; Vila, A; Morante, JR; Sabate, N; Gracia, I; Cane, C

Source

SENSORS AND ACTUATORS B-CHEMICAL; APR 26 2006, 114 2, p826-p835, 10p.

Subject

Language

English

ISSN

09254005

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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