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Qualification of 300 mm SOICMOS substrate material: readiness for development and manufacturing

Document Type

Journal

Author

Hovel, H; Almonte, M; Tsai, P; Lee, JD; Maurer, S; Kleinhenz, R; Schepis, D; Murphy, R; Ronsheim, P; Domenicucci, A; Bettinger, J; Sadana, D

Source

SOLID-STATE ELECTRONICS; JUN 2004, 48 6, p1065-p1072, 8p.

Subject

Language

English

ISSN

00381101

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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