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Plasma processes in microelectronic device manufacturing

Document Type

Journal

Author

Rogers, BR; Cale, TS

Source

VACUUM; MAY 27 2002, 65 3-4, p267-p279, 13p.

Subject

Language

English

ISSN

0042207X

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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