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Ga assisted in situ etching of AlGaInAs and InGaAsP multi quantum well structures using tertiarybutylchloride

Document Type

Journal

Author

Codato, S; Campi, R; Rigo, C; Stano, A

Source

JOURNAL OF CRYSTAL GROWTH; AUG 15 2005, 282 1-2, p7-p17, 11p.

Subject

Language

English

ISSN

00220248

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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