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Seed layer corrosion of damascene structures in copper sulfonate electrolytes

Document Type

Journal

Author

Martyak, NM; Ricou, P

Source

MATERIALS CHEMISTRY AND PHYSICS; MAR 15 2004, 84 1, p87-p98, 12p.

Subject

Language

English

ISSN

02540584

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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