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Applications of metallic borides for gate electrodes in CMOS integrated circuits

Document Type

Journal

Author

Zagozdzon-Wosik, W; Darne, C; Radhakrishnan, D; Rusakova, I; van der Heide, P; Zhang, ZH; Bennett, J; Trombetta, L; Majhi, P; Matron, D

Source

REVIEWS ON ADVANCED MATERIALS SCIENCE; DEC 2004, 8 2, p185-p194, 10p.

Subject

Language

English

ISSN

16065131

Online Access

Web of Science JCR 저널정보 Find it@PNU

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