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Plasma etch rates: The impact of mask transmittance

Document Type

Journal

Author

Source

SOLID STATE TECHNOLOGY; AUG 2001, 44 8, p55-p+, 4p.

Subject

Language

English

ISSN

0038111X

Online Access

EBSCOHost PDF Full Text (Gale General Onefile) Full Text (Gale Academic Onefile) Web of Science Scopus Find it@PNU

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