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Chemical mapping of polymer photoresists by scanning transmission x-ray microscopy

Document Type

Journal

Author

Muntean, L; Planques, R; Kilcoyne, ALD; Leone, SR; Gilles, MK; Hinsberg, WD

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B; JUL-AUG 2005, 23 4, p1630-p1636, 7p.

Subject

Language

English

ISSN

10711023

Online Access

Web of Science Scopus Find it@PNU

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