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Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy

Document Type

Journal

Author

Potma, EO; Xie, XS; Muntean, L; Preusser, J; Jones, D; Ye, J; Leone, SR; Hinsberg, WD; Schade, W

Source

JOURNAL OF PHYSICAL CHEMISTRY B; JAN 29 2004, 108 4, p1296-p1301, 6p.

Subject

Language

English

ISSN

15206106

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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