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Electron Penetration Depths in EUV Photoresists

Document Type

Journal

Author

Torok, Justin; Srivats, Bharath; Memon, Shahid; Herbol, Henry; Schad, Jonathan; Das, Sanjana; Ocola, Leonidas; Denbeaux, Greg; Brainard, Robert L.

Source

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY; 2014, 27 5, p611-p615, 5p.

Subject

Language

English

ISSN

09149244

Online Access

Web of Science JCR 저널정보 Scopus Find it@PNU

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