학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

Interconnect capacitance characterization using charge-injection-induced error-free (CIEF) charge-based capacitance measurement (CBCM)

Document Type

Journal

Author

Chang, YW; Chang, HW; Lu, TC; King, YC; Ting, WC; Ku, YHJ; Lu, CY

Source

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING; FEB 2006, 19 1, p50-p56, 7p.

Subject

Language

English

ISSN

15582345

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일