학술논문
Ultralow-k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform
Document Type
Journal
Author
Lin, Cheng-Ming; Hsu, Chuang-Han; Huang, Wei-Yu; Astie, Vincent; Cheng, Po-Hsien; Lin, Yue-Min; Hu, Wei-Shan; Chen, Szu-Hua; Lin, Han-Yu; Li, Ming-Yang; Magyari-Kope, Blanka; Yang, Chi-Ming; Decams, Jean-Manuel; Lee, Tzu-Lih; Gui, Dong; Wang, Han; Woon, Wei-Yen; Lin, Pinyen; Wu, Jeff; Lee, Jang-Jung; Liao, Szuya Sandy; Cao, Min
Source
Subject
Language
English
ISSN
2365709X