학술논문 – 부산대학교 도서관

학술논문

replay검색결과 돌아가기

search검색화면

Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si

Document Type

Journal

Author

Sah, Ram Ekwal; Driad, Rachid; Bernhardt, Frank; Kirste, Lutz; Leancu, Crenguta-Columbina; Czap, Heiko; Benkhelifa, Fouad; Mikulla, Michael; Ambacher, Oliver

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A; JUL-AUG 2013, 31 4, p041502 7p.

Subject

Language

English

ISSN

07342101

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

이메일