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Integration issues of high-k and metal gate into conventional CMOS technology

Document Type

Journal

Author

Song, SC; Zhang, Z; Huffman, C; Bae, SH; Sim, JH; Kirsch, P; Majhi, P; Moumen, N; Lee, BH

Source

THIN SOLID FILMS; MAY 10 2006, 504 1-2, p170-p173, 4p.

Subject

Language

English

ISSN

00406090

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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