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Integration of dual metal gate CMOS on high-k dielectrics utilizing a metal wet etch process

Document Type

Journal

Author

Zhang, ZB; Song, SC; Huffman, C; Hussain, MM; Barnett, J; Moumen, N; Alshareef, HN; Majhi, P; Sim, JH; Bae, SH; Lee, BH

Source

ELECTROCHEMICAL AND SOLID STATE LETTERS; 2005, 8 10, pG271-pG274, 4p.

Subject

Language

English

ISSN

10990062

Online Access

Web of Science Scopus Find it@PNU

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