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Microrobot system for automatic nanohandling inside a scanning electron microscope

Document Type

Journal

Author

Fatikow, Sergej; Wich, Thomas; Huelsen, Helge; Sievers, Torsten; Jaehnisch, Marco

Source

IEEE-ASME TRANSACTIONS ON MECHATRONICS; JUN 2007, 12 3, p244-p252, 9p.

Subject

Language

English

ISSN

1941014X

Online Access

Full Text (IEEE) Web of Science JCR 저널정보 Scopus Find it@PNU

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