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Some effects of temperature ramping on metal organic chemical vapor deposited Al film nucleation

Document Type

Journal

Author

Yang, D; Jonnalagadda, R; Mahadev, V; Cale, TS; Hillman, JT; Foster, RF; Rogers, BR

Source

THIN SOLID FILMS; OCT 31 1997, 308 p615-p620, 6p.

Subject

Language

English

ISSN

18792731

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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