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Surface energy engineering for LiTaO3 and alpha-quartz SiO2 for low temperature (< 220 degrees C) wafer bonding

Document Type

Journal

Author

Baker, Brian; Herbots, Nicole; Whaley, Shawn D.; Sahal, Mohammed; Kintz, Jacob; Yano, Aliya; Narayan, Saaketh; Brimhall, Alex L.; Lee, Wey-Lyn; Akabane, Yuko; Culbertson, Robert J.

Source

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A; JUL 2019, 37 4, p041101 17p.

Subject

Language

English

ISSN

15208559

Online Access

Full Text (AIP) Web of Science JCR 저널정보 Scopus Find it@PNU

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