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Instabilities in an inductively coupled oxygen plasma

Document Type

Journal

Author

Corr, CS; Steen, PG; Graham, WG

Source

PLASMA SOURCES SCIENCE & TECHNOLOGY; MAY 2003, 12 2, p265-p272, 8p.

Subject

Language

English

ISSN

09630252

Online Access

Web of Science JCR 저널정보 Scopus Find it@PNU

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