학술논문

The interaction between Xe and F in Si(100) pre-amorphised with 20 keV Xe and implanted with low energy BF2
Document Type
Journal
Source
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY; DEC 15 2004, 114 p198-p202, 5p.
Subject
Language
English
ISSN
09215107