학술논문

SELECTIVE METALLIZATION OF SILICON SURFACES - THE ADSORPTION OF STERICALLY STABILIZED PALLADIUM PARTICLES ON H-TERMINATED SI(100), SI3N4, AND SIO2
Document Type
Journal
Source
JOURNAL OF THE ELECTROCHEMICAL SOCIETY; FEB 1995, 142 2, p519-p524, 6p.
Subject
Language
English
ISSN
00134651