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A novel Ni capped high Q copper air gap spiral inductor

Document Type

Journal

Author

Lin, CS; Fang, YK; Chen, SF; Lin, CY; Chou, TH; Chen, SM; Hsieh, MC

Source

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING; AUG 2005, 8 4, p545-p549, 5p.

Subject

Language

English

ISSN

18734081

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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